Company Filing History:
Years Active: 2004
Title: **Innovator Spotlight: Sian-Ren Horng and His Contributions to Dielectric Layer Metrology**
Introduction
Sian-Ren Horng is an accomplished inventor based in Tainan, Taiwan. He is renowned for his innovative approaches in the field of semiconductor manufacturing, particularly focusing on the precision of dielectric layer measurements. His expertise has contributed significantly to advancements in metrology calibration techniques.
Latest Patents
Sian-Ren Horng holds a patent titled "Method for Improved Dielectric Layer Metrology Calibration." This invention presents a method for measuring a dielectric layer thickness calibration reference standard. It entails providing a substrate with a dielectric layer intended for calibrating a dielectric layer thickness measuring tool. The process involves cleaning the dielectric layer through methods such as spraying and scrubbing, followed by measuring the thickness with the tool, which can assess a portion of the dielectric layer that is displaced from the substrate's center. This innovative method enhances the accuracy of dielectric layer measurements, a crucial factor in semiconductor quality assurance.
Career Highlights
Sian-Ren is an integral part of Taiwan Semiconductor Manufacturing Company Limited (TSMC), where he applies his skills and knowledge to develop cutting-edge technologies. His contributions have helped TSMC maintain its competitive edge in the semiconductor industry, particularly in enhancing manufacturing processes and measurement accuracy.
Collaborations
Throughout his career, Sian-Ren Horng has collaborated with distinguished colleagues, including Pey-Yuan Lee and Chi-Shen Lo. Together, they have worked on various projects that emphasize the importance of precision in semiconductor manufacturing and contribute to the ongoing improvements in the field.
Conclusion
Sian-Ren Horng's work exemplifies the spirit of innovation within the semiconductor industry. His patented approach to dielectric layer metrology calibration not only contributes to the accuracy of measurements but also highlights his role as a key player in the advancements at Taiwan Semiconductor Manufacturing Company Limited. Through his collaborations and ongoing research, Sian-Ren continues to pave the way for future innovations in semiconductor technology.