Shy-Chy Wong

Title: Innovations by Shy-Chy Wong in Metal Capacitor Fabrication

Introduction

Shy-Chy Wong is an accomplished inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the fabrication of high-reliability metal capacitors. His innovative approach has the potential to enhance the performance and reliability of electronic devices.

Latest Patents

Wong holds a patent for a method to fabricate a high-reliability metal capacitor within a copper back-end process. This patent outlines a new method for creating a metal capacitor that integrates seamlessly into back-end processing. The process involves creating a first layer of metal interconnect, providing a contact point aligned with the capacitor, and forming a copper interconnect over the contact point. The use of TaN for both the bottom and top plates, along with a high dielectric-constant dielectric material, ensures the capacitor's reliability. The layers are then patterned and etched, with a spacer layer formed to prevent sidewall leakage.

Career Highlights

Wong is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., where he continues to innovate in semiconductor fabrication techniques. His work has been instrumental in advancing the reliability of electronic components, which is crucial for modern technology.

Collaborations

Wong collaborates with talented colleagues, including Chi-Feng Huang and Chun-Hon Chen. Their combined expertise fosters a creative environment that drives innovation in their projects.

Conclusion

Shy-Chy Wong's contributions to the field of semiconductor technology, particularly through his patented method for fabricating high-reliability metal capacitors, highlight his role as a key innovator. His work not only enhances the reliability of electronic devices but also sets a foundation for future advancements in the industry.