Company Filing History:
Years Active: 2025
Title: Shusei Kato: Innovator in Plasma Processing Technology
Introduction
Shusei Kato is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 2 patents. His innovative work has advanced the capabilities of substrate processing systems, making them more efficient and effective.
Latest Patents
Kato's latest patents include a plasma processing apparatus and a substrate processing system with a method for installing an edge ring. The plasma processing apparatus features a chamber, a substrate support with a ring supporting surface, and an insulating ring with multiple through holes. This design enhances the functionality of the apparatus by incorporating lift pins and an actuator for vertical movement. The substrate processing system includes a plasma processing apparatus, a decompression transferrer, and control circuitry that manages the loading and processing of edge rings, ensuring precise electrostatic clamping and plasma generation.
Career Highlights
Shusei Kato has built a successful career at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in developing advanced technologies that improve substrate processing efficiency. Kato's expertise in plasma processing has positioned him as a key figure in the field.
Collaborations
Throughout his career, Kato has collaborated with talented individuals such as Takashi Aramaki and Lifu Li. These partnerships have fostered innovation and contributed to the success of various projects within the company.
Conclusion
Shusei Kato's contributions to plasma processing technology exemplify his dedication to innovation and excellence. His patents and work at Tokyo Electron Limited continue to influence the industry and pave the way for future advancements.