This inventor holds 3 USPTO granted patents and 3 published patent applications. Top assignees: Kabushiki Kaisha Toshiba, Toshiba Memory Corporation. Active years: 2010-2018.
Company Filing History:
Years Active: 2010-2018
Title: Shunsuke Doi: Innovator in Semiconductor Manufacturing
Introduction
Shunsuke Doi is a prominent inventor based in Yokkaichi, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 3 patents. His work focuses on innovative methods and apparatuses that enhance the efficiency and effectiveness of semiconductor device fabrication.
Latest Patents
Doi's latest patents include a semiconductor manufacturing apparatus and a method of manufacturing semiconductor devices. The semiconductor manufacturing apparatus features a polishing table designed to hold and rotate a polishing pad for substrate polishing. It also includes a dressing module that maintains the polishing pad's surface by sweeping it with a dresser while rotating. The controller of the apparatus regulates the polishing table's revolutions based on the dresser's position.
The method of fabricating a semiconductor device involves forming an amorphous silicon film above a semiconductor substrate. It includes partially removing both the amorphous silicon film and the substrate to create an element isolation trench. An insulating film is then formed to fill the trench, followed by polishing the insulating film using a chemical-mechanical polishing method. This process ultimately converts the amorphous silicon film into a polysilicon film after polishing.
Career Highlights
Shunsuke Doi has worked with notable companies such as Kabushiki Kaisha Toshiba and Toshiba Memory Corporation. His experience in these organizations has allowed him to develop and refine his innovative approaches to semiconductor manufacturing.
Collaborations
Doi has collaborated with esteemed colleagues, including Takashi Watanabe and Yukiteru Matsui. Their combined expertise has contributed to advancements in the semiconductor industry.
Conclusion
Shunsuke Doi's contributions to semiconductor manufacturing through his patents and collaborations highlight his role as an influential inventor in the field. His innovative methods and apparatuses continue to shape the future of semiconductor technology.