Company Filing History:
Years Active: 2025
Title: Shuhei Nemoto: Innovator in Substrate Processing Technology
Introduction
Shuhei Nemoto is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 2 patents. His innovative work focuses on enhancing the efficiency and effectiveness of substrate processing apparatuses.
Latest Patents
One of his latest patents is a substrate processing apparatus. This invention features a substrate holder that is rotatably positioned about a vertical axis, designed to suck and hold the central part of a substrate's lower surface. It includes a rotating mechanism that outputs a rotational driving force to rotate the substrate holder, along with a processing mechanism that supplies a processing liquid to the substrate. Additionally, a rotating cup surrounds the rotating substrate, collecting liquid droplets of the processing liquid that may scatter from the substrate. The rotating mechanism also incorporates a power transmitter that transmits part of the rotational driving force to the rotating cup, allowing simultaneous rotation of both the substrate holder and the rotating cup.
Another significant patent by Nemoto is a centering device, centering method, and substrate processing apparatus. In this invention, a substrate is supported on a substrate support and surrounded by three contact members positioned at reference points in the horizontal plane. These contact members gradually approach the substrate while maintaining equal distances from the center of the substrate support. The substrate's posture is adjusted so that the direction of eccentricity aligns with a virtual line before the movements of the contact members commence.
Career Highlights
Shuhei Nemoto has established himself as a key figure in the substrate processing industry. His work at Screen Holdings Co., Ltd. has allowed him to develop and refine technologies that are crucial for modern manufacturing processes. His innovative designs and methodologies have contributed to advancements in substrate processing techniques.
Collaborations
Throughout his career, Nemoto has collaborated with talented individuals such as Itsuki Kajino and Shoyo Minami. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies in substrate processing.
Conclusion
Shuhei Nemoto's contributions to substrate processing technology are noteworthy and impactful. His patents reflect a commitment to innovation and excellence in the field. As he continues to work with his colleagues, the future of substrate processing looks promising.