This inventor holds 1 USPTO granted patent. Top assignee: United Microelectronics Corp.. Active years: 1998.
Company Filing History:
Years Active: 1998
Title: Innovations of Shuh-Ren Chen in Semiconductor Manufacturing
Introduction
Shuh-Ren Chen is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent related to titanium silicide processing. His work is essential for advancing integrated circuit technology.
Latest Patents
Shuh-Ren Chen holds a patent for a "Low temperature method of manufacturing epitaxial titanium silicide." This method allows for the production of epitaxial titanium silicide at lower processing temperatures than usual. This innovation is particularly beneficial for integrated circuit manufacturing, as it results in titanium silicide that is free of grain boundaries, thereby reducing electrical resistance. The process involves providing a silicon substrate with an exposed crystalline silicon layer, followed by the sequential formation of a titanium layer and a titanium nitride layer. Finally, a rapid thermal processing step is employed to form the epitaxial titanium silicide layer.
Career Highlights
Shuh-Ren Chen is associated with United Microelectronics Corporation, a leading company in the semiconductor industry. His work at this organization has allowed him to contribute to advancements in manufacturing techniques that are crucial for modern electronics.
Collaborations
One of his notable collaborators is Jiunn Hsien Lin. Their partnership has likely fostered innovative ideas and solutions in the semiconductor field.
Conclusion
Shuh-Ren Chen's contributions to semiconductor manufacturing through his patent on low-temperature processing methods highlight his role as an influential inventor in the industry. His work continues to impact the efficiency and effectiveness of integrated circuit production.