This inventor holds 4 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 2017-2022.
Company Filing History:
Years Active: 2017-2022
Title: Shubham Chourey: Innovator in Thermal Management Systems
Introduction
Shubham Chourey is a notable inventor based in Indore, India. He has made significant contributions to the field of thermal management systems, particularly in wafer processing technologies. With a total of 4 patents to his name, Chourey is recognized for his innovative approaches to improving workpiece handling and temperature control.
Latest Patents
One of Chourey's latest patents is focused on bolted wafer chuck thermal management systems and methods for wafer processing systems. This invention features a workpiece holder that includes a puck, along with first and second heating devices that are in thermal communication with the inner and outer portions of the puck. A thermal sink is also integrated into the design, which is in thermal communication with the puck. The heating devices are independently controllable, allowing for precise temperature management. The method involves flowing a heat exchange fluid through the thermal sink to establish a reference temperature, while the heating devices raise the temperatures of the puck's inner and outer portions to specific levels. This innovative approach enhances the efficiency of wafer processing systems.
Career Highlights
Chourey is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at this organization has allowed him to further develop his expertise in thermal management systems and contribute to cutting-edge technologies in the semiconductor industry.
Collaborations
Throughout his career, Chourey has collaborated with talented professionals, including David Benjaminson and Saravanakumar Natarajan. These collaborations have fostered a creative environment that encourages innovation and the development of advanced technologies.
Conclusion
Shubham Chourey is a prominent inventor whose work in thermal management systems has made a significant impact in the field of wafer processing. His innovative patents and contributions to Applied Materials, Inc. highlight his dedication to advancing technology. Chourey's achievements reflect the importance of innovation in driving progress within the industry.