Shu-Ting Yang

Title: Innovations by Shu-Ting Yang in Semiconductor Technology

Introduction

Shu-Ting Yang is a notable inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent that addresses critical challenges in the manufacturing process.

Latest Patents

Shu-Ting Yang holds a patent for a semiconductor device pre-cleaning technique. This technique is designed to effectively remove native oxides and other contaminants from semiconductor devices. The method minimizes the risk of chopping, clipping, and sidewall spacer thickness reduction. A protection layer is formed on a capping layer over a gate structure of a transistor, allowing for a pre-cleaning operation that consumes the protection layer instead of the capping layer material. This innovative approach reduces the likelihood of material removal from the capping layer during the pre-cleaning process.

Career Highlights

Shu-Ting Yang is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing semiconductor manufacturing techniques, contributing to the efficiency and reliability of semiconductor devices.

Collaborations

Shu-Ting Yang has collaborated with notable colleagues, including Yi-Hsiang Chao and Chih-Sheng Chou. Their combined expertise has fostered innovation and development in semiconductor technologies.

Conclusion

Shu-Ting Yang's contributions to semiconductor technology through his innovative patent demonstrate his commitment to advancing the field. His work continues to influence the manufacturing processes that are vital to modern electronics.