Company Filing History:
Years Active: 2005-2006
Title: Innovations of Inventor Shu Qin
Introduction
Shu Qin is a notable inventor based in Malden, MA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on improving the efficiency and effectiveness of semiconductor processing methods.
Latest Patents
One of Shu Qin's latest patents is titled "Clamping and de-clamping semiconductor wafers on a J-R electrostatic chuck having a micromachined surface by using force delay in applying a single-phase square wave AC clamping voltage." This invention presents a method and system for clamping a wafer to a J-R electrostatic chuck using a single-phase square wave AC clamping voltage. The method involves determining a clamping voltage based on the minimum residual clamping force and the surface topography of a leaky dielectric layer. This innovation allows for a significant reduction in de-clamping time upon removal of the clamping voltage.
Another significant patent is the "MEMS based multi-polar electrostatic chuck." This invention relates to a semiconductor processing apparatus that controls heat transfer while clamping a semiconductor substrate. The multi-polar electrostatic chuck features a semiconductor platform with uniform gaps that allow for controlled heat transfer coefficients. This design enhances the uniformity of contact conductivity across the substrate, improving overall processing efficiency.
Career Highlights
Shu Qin is currently employed at Axcelis Technologies, Inc., where he continues to develop innovative solutions in semiconductor technology. His work has contributed to advancements in the field, making processes more efficient and effective.
Collaborations
Shu Qin has collaborated with notable colleagues, including Peter Lawrence Kellerman and Douglas A Brown. These collaborations have fostered a productive environment for innovation and development in semiconductor technologies.
Conclusion
Shu Qin's contributions to semiconductor technology through his patents and collaborations highlight his role as a significant inventor in the field. His innovative approaches continue to influence advancements in semiconductor processing methods.