Location History:
- Pan-Chiau, TW (1993 - 1995)
- Hsin-Chu, TW (1997 - 1999)
Company Filing History:
Years Active: 1993-1999
Title: Innovations of Shu-Lan Ying in Semiconductor Technology.
Introduction
Shu-Lan Ying is a notable inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on improving the efficiency and accuracy of semiconductor manufacturing processes.
Latest Patents
One of Shu-Lan Ying's latest patents is titled "Test site and a method of monitoring via etch depths for semiconductor." This invention provides a test site on a product wafer for measuring via etch depth and a method of monitoring the depth of the vias using the test site. A substrate is provided that includes a test site area and a circuit area. A test site via is formed in the test site area, which is utilized to measure the depth of the insulating layers remaining in the test site via and the depth of the test site via itself. The measurements are taken using an in-line non-destructible measurement tool, such as an ellipsometer or spectrophotometer. The test site is specifically designed to be large enough to allow for accurate measurement of the via depth. The depth of the oxide remaining in the test site via is measured after the via etch and is correlated to the amount of titanium nitride removed from the tops of the metal lines in the circuit areas. The via etch process is then adjusted to ensure that the vias are deep enough without removing too much of the top barrier layer, such as titanium nitride, over the metal lines.
Career Highlights
Shu-Lan Ying is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing the methodologies used in semiconductor fabrication.
Collaborations
Shu-Lan Ying has collaborated with several talented individuals in his field, including Lih-Shyng Tsai and Jiunn-Jyi Lin. Their combined expertise has contributed to the success of various projects and innovations.
Conclusion
Shu-Lan Ying's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence the efficiency and effectiveness of semiconductor manufacturing processes.