Shu-Hsin Kao

Title: **The Innovative Mind of Shu-Hsin Kao**

Introduction

Shu-Hsin Kao is a prominent inventor based in Redwood City, California. With a remarkable portfolio of nine patents, he has significantly contributed to the field of polishing systems, particularly in the realm of chemical mechanical polishing. His inventive spirit continues to push the boundaries of technology, resulting in advancements that improve the efficiency and effectiveness of polishing processes.

Latest Patents

Kao’s most notable patents revolve around innovative polishing systems that incorporate hydrostatic fluid bearing support. One such patent details a polishing system featuring a hydrostatic fluid bearing that supports polishing pads. This system introduces several novel aspects, including compliant surfaces surrounding fluid inlets that extend the areas of elevated support pressure. Another groundbreaking aspect involves the modulation or reversal of fluid flow within the bearing, which reduces deviations in time-averaged support pressure and induces vibrations in the polishing pads for enhanced performance.

His inventions also include a hydrostatic bearing with a cavity larger than the polished object, allowing for nearly uniform support pressure across an area surrounded by a retaining ring. By adjusting the fluid pressure to the retaining ring, the fluid film thickness of the bearing can be modified. Additionally, Kao has developed hydrostatic bearings with unique drain groove designs, achieving a balance between non-uniform support pressure profiles and uniform average pressures to wafers being polished.

Career Highlights

Throughout his career, Shu-Hsin Kao has worked with several esteemed companies, including Aplex, Inc. and Mosel Vitelic Corporation. His experience in these organizations has equipped him with invaluable insights and skills, allowing him to excel in the realm of innovative polishing technologies.

Collaborations

Kao has collaborated with talented individuals such as David E Weldon and Tim H Huynh, contributing to a dynamic exchange of ideas and knowledge that fosters innovation within his work. These partnerships reflect the collaborative spirit that is often an essential component of successful invention.

Conclusion

Shu-Hsin Kao's contributions to the field of polishing systems exemplify the importance of innovation in technology. With a focus on hydrostatic fluid bearing supports, his inventions continue to pave the way for advancements that enhance polishing performance. As a prolific inventor, Kao’s work serves as an inspiration for future generations of innovators looking to make their mark in the industry.