Enter assignee name

Forward Citations = 89

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7 inventors (with patents filed for the assignee):

David E Weldon (2 out of 17 patents)

Shu-Hsin Kao (2 out of 9 patents)

Shou-sung Chang (2 out of 7 patents)

4. Huey-Ming Tzeng (1 out of 25 patents)

5. Tim H Huynh (1 out of 6 patents)

6. Ethan C Wilson (1 out of 5 patents)

7. Gregory A Appel (1 out of 5 patents)

4 patents: Sort by Forward Citations

1. 6080040 - Wafer carrier head with inflatable bladder and attack angle control for (2000-06-27),

2. 6062959 - Polishing system including a hydrostatic fluid bearing support (2000-05-16),

3. 5980368 - Polishing tool having a sealed fluid chamber for support of polishing pad (1999-11-09),

4. 5934974 - In-situ monitoring of polishing pad wear (1999-08-10),

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