Shrihari Sampathkumar

Title: Innovations by Shrihari Sampathkumar

Introduction

Shrihari Sampathkumar is an accomplished inventor based in Mountain View, California. He has made significant contributions to the field of metrology through his innovative designs and patents. His work primarily focuses on enhancing the functionality and efficiency of processing chambers in various applications.

Latest Patents

Shrihari holds a patent for "Metrology Slot Plates." This invention describes metrology slot plates, processing chamber lids, and processing chambers that incorporate these plates. Each metrology slot plate includes various components such as a plate blank, a reflectometer, a capacitance sensor, a gas flow meter, a manometer, a pyrometer, a distance sensor (laser), or an emissometer. This patent showcases his expertise in integrating advanced technologies to improve measurement accuracy in processing environments.

Career Highlights

Shrihari Sampathkumar is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His role involves developing innovative solutions that enhance the performance of manufacturing processes. His contributions have been instrumental in advancing the capabilities of metrology tools used in high-tech industries.

Collaborations

Shrihari has collaborated with notable colleagues such as Kenneth Brian Doering and Vivek Bharat Shah. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.

Conclusion

Shrihari Sampathkumar's work exemplifies the spirit of innovation in the field of metrology. His patent for metrology slot plates reflects his commitment to improving measurement technologies in processing chambers. His contributions continue to influence advancements in the semiconductor industry.