The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2024
Filed:
Sep. 03, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Kenneth Brian Doering, San Jose, CA (US);
Vivek B. Shah, Santa Clara, CA (US);
Ashutosh Agarwal, San Jose, CA (US);
Sanjeev Baluja, Campbell, CA (US);
Shrihari Sampathkumar, Mountain View, CA (US);
Chunlei Zhang, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67248 (2013.01); H01L 22/12 (2013.01); H01L 22/30 (2013.01); H01L 21/67103 (2013.01);
Abstract
Metrology slot plates, processing chamber lids and processing chambers having metrology slot plates are described. Each of the metrology slot plates independently comprises one or more of a plate blank, a reflectometer, a capacitance sensor, a gas flow meter, a manometer, a pyrometer, a distance sensor (laser) or an emissometer.