Company Filing History:
Years Active: 2012-2014
Title: Innovations by Inventor Shouken Moro: Patent Contributions in Substrate Processing Technologies
Introduction: Shouken Moro, an inventive mind based in Koshi, Japan, has made significant contributions to the field of substrate processing. Holding two patents, his work showcases innovative approaches that enhance the efficiency and effectiveness of substrate handling in various applications.
Latest Patents: Moro’s latest patents focus on advancements in substrate processing. The first patent describes a substrate processing apparatus that features a heat exchange plate designed for heating and cooling substrates. This apparatus includes multiple protrusions that enable substrate placement while maintaining a gap for optimal temperature control. Furthermore, it incorporates a suction mechanism that draws substrates onto the protrusions, enhancing the stability during processing. The second patent details a heat processing method where multiple suction ports are strategically positioned on a heating plate. This design allows for real-time adjustments based on the substrate's warping state, ensuring uniform heating and correction of any warpage, thereby optimizing the processing outcomes.
Career Highlights: Shouken Moro is associated with Tokyo Electron Limited, a prominent company specializing in semiconductors and electronics. His role as an inventor has positioned him at the forefront of technological innovation within the company, contributing to the development of advanced manufacturing techniques.
Collaborations: Throughout his career, Moro has collaborated with notable figures in the industry, including colleagues Yoshiteru Fukuda and Kenichi Shigetomi. Together, they have worked to push the boundaries of substrate processing technology, resulting in patents that serve as a foundation for future innovations.
Conclusion: Shouken Moro's inventive spirit and technical expertise have led to significant patents that enhance substrate processing methods and apparatus. His contributions not only reflect his skills as an inventor, but also demonstrate the importance of collaboration in advancing technological capabilities in the semiconductor industry.