Tokyo, Japan

Shou Takami


Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2018-2019

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2 patents (USPTO):Explore Patents

Title: Shou Takami: Innovator in Measurement Technology

Introduction

Shou Takami is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of measurement technology, particularly through his innovative patents. With a total of 2 patents, Takami's work focuses on enhancing the precision of measurement devices.

Latest Patents

Takami's latest patents include a pattern height measurement device and a charged particle beam device. The pattern height measurement device is designed for high-precision measurement of fine patterns. It utilizes a calculation device that determines dimensions in the height direction based on first reflected light information obtained from a sample. This device also calculates second reflected light information by analyzing the relationship between the dimensions of a pattern formed on the sample and the reflected light information. The output provides accurate height measurements of the sample.

The charged particle beam device aims to achieve highly accurate measurements in the depth direction of structures on a sample. It features a calculation device that determines the size of a structure based on detection signals from a charged particle beam. This device calculates the distance between two charged particle beam irradiation marks at different heights, allowing for precise depth measurements.

Career Highlights

Shou Takami is currently employed at Hitachi High-Technologies Corporation, where he continues to develop innovative measurement technologies. His work has significantly advanced the capabilities of measurement devices in various applications.

Collaborations

Takami collaborates with notable colleagues, including Hiroki Kawada and Muneyuki Fukuda. Their combined expertise contributes to the development of cutting-edge technologies in the field.

Conclusion

Shou Takami's contributions to measurement technology through his patents reflect his dedication to innovation and precision. His work continues to influence the industry and enhance measurement capabilities.

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