This inventor holds 1 USPTO granted patent. Top assignee: Beijing Naura Microelectronics Equipment Co., Ltd.. Active years: 2025.
Company Filing History:
Years Active: 2025
Title: Shiru Wang: Innovator in Semiconductor Technology
Introduction
Shiru Wang is a prominent inventor based in Beijing, China. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent. His work is instrumental in advancing the efficiency and effectiveness of semiconductor processes.
Latest Patents
Shiru Wang holds a patent for a "Semiconductor process apparatus and process chamber." This invention includes a chamber body, a base, and a magnetic conductive device. The base is arranged within the chamber body and features a carrier surface designed to support a wafer. The magnetic conductive device consists of a magnet structure and a magnetic conductive structure made from a soft magnetic material. The magnet structure surrounds the base and generates a magnetic field above it. The magnetic conductive structure is positioned beneath the carrier surface of the base, maintaining a preset distance from it. This design guides the distribution of the magnetic field lines, ensuring an even intensity of the magnetic field above the base and consistent directions of the magnetic field lines across different positions of the carrier surface.
Career Highlights
Shiru Wang is associated with Beijing Naura Microelectronics Equipment Co., Ltd., where he applies his expertise in semiconductor technology. His innovative approach has led to advancements in the manufacturing processes of microelectronics, contributing to the company's reputation in the industry.
Collaborations
Shiru Wang collaborates with Yujie Yang, a fellow innovator in the field. Their partnership enhances the research and development efforts at their company, fostering an environment of innovation and creativity.
Conclusion
Shiru Wang's contributions to semiconductor technology through his patent and work at Beijing Naura Microelectronics Equipment Co., Ltd. highlight his role as a key innovator in the industry. His advancements are paving the way for future developments in semiconductor processes.