Shintaro Kaido

Title: Shintaro Kaido: Innovator in Metal Oxide Hardmask Technology

Introduction

Shintaro Kaido is a prominent inventor based in Machida, Japan. He has made significant contributions to the field of materials science, particularly in the development of methods for forming metal oxide hardmasks. His innovative approach has implications for various applications in semiconductor manufacturing.

Latest Patents

Shintaro Kaido holds a patent for a method of forming a metal oxide hardmask. This method involves providing a template made of photoresist or amorphous carbon on a substrate. The process includes depositing a metal oxide hardmask on the template using atomic layer deposition (ALD). The material used in this method has a formula SiMO, where M represents at least one metal element, x is less than one including zero, and y is approximately two or a stoichiometrically-determined number. This patent showcases his expertise in advanced material processing techniques.

Career Highlights

Shintaro Kaido is currently employed at ASM Japan K.K., a company known for its cutting-edge technology in the semiconductor industry. His work at ASM Japan K.K. has allowed him to collaborate with other talented professionals in the field, enhancing the company's innovative capabilities.

Collaborations

Throughout his career, Shintaro has worked alongside notable colleagues such as Jeongseok Ha and Hideaki Fukuda. These collaborations have contributed to the advancement of technology in their respective areas of expertise.

Conclusion

Shintaro Kaido's contributions to the field of metal oxide hardmask technology exemplify his innovative spirit and dedication to advancing materials science. His work continues to influence the semiconductor industry and inspire future innovations.