Tokyo, Japan

Shinobu Saitoh


Average Co-Inventor Count = 4.5

ph-index = 2

Forward Citations = 12(Granted Patents)


Company Filing History:


Years Active: 2000-2009

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3 patents (USPTO):Explore Patents

Title: Innovations of Shinobu Saitoh in Semiconductor Technology

Introduction

Shinobu Saitoh is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the reliability and efficiency of semiconductor devices.

Latest Patents

One of his latest patents is a semiconductor device and its manufacturing method. This technique provides protection for an interlayer insulating film made of an organic low dielectric constant material from damage during semiconductor processes. It also aims to reduce leak current in the interlayer insulating film, thereby enhancing the reliability of the semiconductor device. The invention features organic insulating films with openings, where modified portions facing the openings contain fluorine and nitrogen atoms. Notably, the concentration of fluorine atoms in these modified portions is lower than that of nitrogen atoms. These modified layers serve to protect the semiconductor device from damage while minimizing corrosion of the conductors embedded in the openings.

Another significant patent involves a method of manufacturing a semiconductor device capable of etching a multi-layer of organic films with high selectivity. In this method, a stacked film comprising a silicon-included organic film and a silicon non-included organic film is utilized. The silicon non-included organic film is etched using a mixed etching gas of N2 and H2.

Career Highlights

Shinobu Saitoh has worked with notable companies, including NEC Corporation. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.

Collaborations

He has collaborated with esteemed colleagues such as Yoshihiro Hayashi and Hiroto Ohtake, further enhancing his contributions to the field.

Conclusion

Shinobu Saitoh's innovative work in semiconductor technology has led to advancements that improve device reliability and manufacturing processes. His patents reflect a commitment to enhancing the efficiency of semiconductor devices, making him a notable figure in the industry.

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