Location History:
- Kurokawa-gun, JP (2022)
- Miyagi, JP (2019 - 2024)
Company Filing History:
Years Active: 2019-2025
Title: Innovative Contributions of Shin Yamaguchi
Introduction
Shin Yamaguchi, a prominent inventor based in Miyagi, Japan, has made significant advancements in the field of plasma processing technology. With a remarkable portfolio of 19 patents, Yamaguchi has been instrumental in developing innovative solutions that enhance substrate support and plasma processing methods.
Latest Patents
Yamaguchi's latest patents showcase his expertise in designing sophisticated plasma processing apparatuses. One notable patent is the "Substrate support and plasma processing apparatus," which features a dual-region support system. The first region is designed to securely hold the substrate, while the second region effectively accommodates an edge ring. This patented design includes first and second electrodes that facilitate distinct electrical biases, contributing to enhanced processing efficiency.
Another significant invention is the "Stage and plasma processing apparatus," which integrates various components within a plasma processing chamber. This apparatus consists of an electrostatic chuck that supports both the substrate and the surrounding edge ring. Precise electrical biases are provided by multiple clamping and bias electrodes, improving the overall performance of plasma processing.
Career Highlights
Yamaguchi holds a prominent position at Tokyo Electron Limited, a leading company in manufacturing equipment for the semiconductor industry. His work has not only advanced the technologies at Tokyo Electron but has also contributed extensively to the field, positioning him as a key player in both the company and the broader industry.
Collaborations
Throughout his career, Shin Yamaguchi has collaborated with other talented inventors, including Akiyoshi Mitsumori and Yasuharu Sasaki. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies in plasma processing.
Conclusion
In conclusion, Shin Yamaguchi's innovative patents and contributions to plasma processing technology illustrate the vital role of inventors in advancing industry standards. His collaboration with esteemed colleagues further underscores the importance of teamwork in the pursuit of scientific and technological excellence. As advancements in this field continue to evolve, Yamaguchi's work will likely remain influential in shaping the future of semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.