Company Filing History:
Years Active: 2004-2005
Title: Innovations of Shih-Shun Chen
Introduction
Shih-Shun Chen is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the area of plasma etching and flash EPROMs. With a total of 2 patents, his work has advanced the efficiency and precision of semiconductor manufacturing processes.
Latest Patents
One of his latest patents is titled "In-situ measurement of wafer position on lower electrode." This invention provides a method and apparatus for accurately measuring the position of a wafer on a lower electrode in a plasma etching device. The process involves determining a differential pressure gradient between the front and back sides of the wafer, allowing for precise positioning during the etching process.
Another significant patent is "Method of forming tiny silicon nitride spacer for flash EPROM by using dry+wet etching technology." This method addresses the challenges of forming small silicon nitride spacers in split-gate flash EPROMs. By combining dry etching with a wet over-etch technique, the invention prevents issues such as "write disturb" and unwanted reverse tunneling. This innovative approach widens the process window, enabling better control over the dimensions and shapes of the spacers, ultimately shortening the manufacturing product cycle.
Career Highlights
Shih-Shun Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this prestigious company has allowed him to contribute to cutting-edge technologies that are essential for modern electronics.
Collaborations
Throughout his career, Shih-Shun Chen has collaborated with talented individuals such as Hung-Hsin Liu and Kwang-Chen Wu. These collaborations have fostered innovation and have led to the development of advanced semiconductor technologies.
Conclusion
Shih-Shun Chen's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a key innovator in the field. His inventions continue to influence the efficiency and effectiveness of semiconductor manufacturing processes.