Shih-Po Lin

Title: Shih-Po Lin: Innovator in Wafer Technology

Introduction

Shih-Po Lin is a notable inventor based in Taipei, Taiwan. She has made significant contributions to the field of semiconductor manufacturing, particularly in the design of clamps used in etching chambers.

Latest Patents

One of her key patents is for a clamp designed to affix a wafer in an etching chamber. This innovative clamp entirely covers the edge of the wafer, with the radius of its inner surface being approximately 1 mm shorter than that of the wafer. The design includes four pairs of square protuberances evenly distributed along the inner surface, which hold the edge of the device regions of the wafer. This feature allows the clamp to properly affix the wafer even if it is slightly misaligned. Additionally, the clamp boasts a lifetime of about 100 hours, which is double that of conventional clamps, thereby reducing costs significantly.

Career Highlights

Shih-Po Lin has worked with prominent companies in the semiconductor industry, including Promos Technologies, Inc. and Mosel Vitelic Corporation. Her experience in these organizations has contributed to her expertise in wafer technology and innovation.

Collaborations

Throughout her career, Shih-Po Lin has collaborated with notable colleagues, including Ray C. Lee and Jim Ho. These partnerships have further enhanced her contributions to the field.

Conclusion

Shih-Po Lin's innovative clamp design represents a significant advancement in wafer technology, showcasing her expertise and commitment to improving semiconductor manufacturing processes. Her work continues to influence the industry positively.