Location History:
- Kumamoto-Ken, JP (2003 - 2004)
- Kikuchi-Gun, JP (2005)
- Kumamoto, JP (2018)
Company Filing History:
Years Active: 2003-2018
Title: Shigeyoshi Kojima: Innovator in Chemical Processing Technologies
Introduction
Shigeyoshi Kojima is a prominent inventor based in Kumamoto-ken, Japan. He has made significant contributions to the field of chemical processing, particularly in methods for removing metal contamination. With a total of 4 patents to his name, Kojima's work has had a substantial impact on the industry.
Latest Patents
Kojima's latest patents include a method for removing metal contamination and an apparatus for substrate processing. The method for removing metal contamination involves a unique approach where a cleaning material reactive to the metal contamination is brought into a gaseous state. This gaseous cleaning material is then supplied to the chemical liquid supply line, effectively reacting with and removing the metal contamination present on the inner wall of the fluorine-based resin.
The substrate processing apparatus developed by Kojima features a heating process chamber designed for wafers, a load lock chamber for controlling oxygen concentration and pressure, and a transferring arm for efficient movement of the wafer. This innovative design allows for the formation of high-quality insulation films while reducing the transferring time period for wafers.
Career Highlights
Shigeyoshi Kojima is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing technologies related to chemical processing and substrate handling.
Collaborations
Kojima has collaborated with notable coworkers such as Takayuki Komiya and Shinji Nagashima. Their combined expertise has contributed to the successful development of innovative solutions in their field.
Conclusion
Shigeyoshi Kojima's contributions to the field of chemical processing through his patents and innovative methods highlight his role as a key inventor in the industry. His work continues to influence advancements in technology and improve processes within the semiconductor manufacturing sector.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.