Shigeru Odagiri

Title: Shigeru Odagiri: Innovator in Wafer Polishing Technology

Introduction

Shigeru Odagiri is a notable inventor based in Yokohama, Japan. He has made significant contributions to the field of wafer polishing technology, holding a total of three patents. His work has been instrumental in advancing the efficiency and precision of wafer polishing processes.

Latest Patents

One of Shigeru Odagiri's latest patents is a wafer polishing method and apparatus. This innovative apparatus includes a wafer polishing assembly that features multiple wafer carriers, allowing for the simultaneous polishing of several wafers against a rotating polishing surface. The design enables a plurality of wafers to be loaded into the wafer carriers at the same time using a wafer holding apparatus on an index table. Additionally, the apparatus allows for the simultaneous unloading of polished wafers back into the wafer holding apparatus. Each wafer carrier is individually controlled by a computer, ensuring precise polishing and accommodating different polishing requirements concurrently.

Career Highlights

Shigeru Odagiri is currently employed at Speedfam Corporation, where he continues to develop and refine wafer polishing technologies. His expertise in this area has positioned him as a key figure in the industry, contributing to advancements that enhance manufacturing processes.

Collaborations

Throughout his career, Shigeru has collaborated with notable colleagues, including Chris E Karlsrud and Anthony G Van Woerkom. These partnerships have fostered innovation and have played a crucial role in the development of new technologies in wafer polishing.

Conclusion

Shigeru Odagiri's contributions to wafer polishing technology exemplify his commitment to innovation and excellence in the field. His patents and work at Speedfam Corporation highlight his role as a leading inventor in this specialized area.