Shigeru Moriya

Title: Shigeru Moriya: Innovator in Mark Signal Amplification

Introduction

Shigeru Moriya is a notable inventor based in Hoya, Japan. He has made significant contributions to the field of electron-beam lithography through his innovative work on mark signal amplifiers. His inventions have enhanced the accuracy of detecting marks on samples, which is crucial for precise positioning in various applications.

Latest Patents

Moriya holds a patent for a mark signal amplifier designed to improve drawing accuracy in electron-beam lithography. The patent outlines a system that includes a first circuit to extract maximum and minimum values from a detected mark signal. A second circuit calculates the peak-to-peak value of the signal's amplitude based on these values. Finally, a third circuit generates a constant amplitude output signal for binary coding, ensuring high accuracy in mark detection despite fluctuations in the signal. This innovative approach has the potential to significantly enhance the precision of electron-beam lithography processes.

Career Highlights

Shigeru Moriya is associated with Hitachi, Ltd., a leading technology company known for its advancements in various fields, including electronics and information technology. His work at Hitachi has allowed him to collaborate with other talented professionals in the industry, furthering the development of innovative technologies.

Collaborations

Moriya has worked alongside notable colleagues such as Nobuo Hamamto and Kazuo Ichino. Their combined expertise has contributed to the success of various projects and innovations within the company.

Conclusion

Shigeru Moriya's contributions to mark signal amplification represent a significant advancement in the field of electron-beam lithography. His innovative patent and collaboration with esteemed colleagues highlight his role as a key inventor in this specialized area.