Company Filing History:
Years Active: 1990-2003
Title: Shigeru Maruyama: Innovator in Charged Particle Beam Technology
Introduction
Shigeru Maruyama is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of 10 patents. His innovative work has paved the way for advancements in various applications, particularly in exposure systems.
Latest Patents
One of Maruyama's latest patents is a charged particle beam exposure system and method. This method involves creating dot pattern data indicative of a pattern to be exposed. It includes storing the dot pattern data in a first storage device with a first access speed, transferring it to a second storage device with a higher access speed, and reading the data out from the second storage device. The system produces multiple charged particle beams in response to the dot pattern data using a blanking aperture array. This array consists of several apertures that control the turning-on and turning-off of the charged particle beams based on the dot pattern data.
Career Highlights
Shigeru Maruyama has had a distinguished career at Fujitsu Corporation, where he has been instrumental in developing cutting-edge technologies. His expertise in charged particle beam systems has led to numerous innovations that enhance the efficiency and effectiveness of exposure methods.
Collaborations
Throughout his career, Maruyama has collaborated with notable colleagues, including Hiroshi Yasuda and Yoshihisa Oae. These partnerships have fostered a creative environment that has resulted in groundbreaking advancements in their field.
Conclusion
Shigeru Maruyama's contributions to charged particle beam technology exemplify his innovative spirit and dedication to advancing the field. His patents and collaborative efforts continue to influence the industry, making him a key figure in modern technological advancements.