Location History:
- Chiba, JP (1987 - 1990)
- Sakura, JP (1996)
Company Filing History:
Years Active: 1987-1996
Title: Shigemi Murakawa: Innovator in Plasma Processing Technology
Introduction
Shigemi Murakawa is a notable inventor based in Chiba, Japan. He has made significant contributions to the field of plasma processing, holding a total of 3 patents. His work focuses on enhancing the efficiency and accuracy of processing systems used in various industrial applications.
Latest Patents
One of Murakawa's latest patents is a plasma processing system and method. This innovative etching system includes a plasma chamber, a charge exchange chamber, and a processing chamber. The charge exchange chamber and the processing chamber are separated by a porous plate featuring numerous fine linear microchannel holes. Positive ions generated in the plasma chamber are accelerated by an electrode in the charge exchange chamber, where they undergo charge exchange and are introduced as neutral particles through the microchannel holes into the processing chamber. This design allows neutral particles to enter an object to be processed as aligned neutral particle beams. The system is particularly effective for etching objects with large surface areas, ensuring high accuracy in the process.
Another significant patent is an apparatus for monitoring burden distribution in a furnace. This invention features a hollow cylindrical sonde that can move radially within the internal space of a furnace, such as a shaft furnace. The sonde is equipped with a burden layer depth sensor and/or a burden grain distribution sensor, allowing for the monitoring of burden depth and grading at multiple radial points within the furnace.
Career Highlights
Shigemi Murakawa is currently employed at Kawasaki Steel Corporation, where he continues to develop innovative technologies in the field of plasma processing. His work has been instrumental in advancing the capabilities of industrial processing systems.
Collaborations
Murakawa has collaborated with several talented individuals, including Seiji Taguchi and Makoto Nomura. These partnerships have contributed to the successful development of his patented technologies.
Conclusion
Shigemi Murakawa's contributions to plasma processing technology demonstrate his innovative spirit and commitment to advancing industrial applications. His patents reflect a deep understanding of the complexities involved in processing systems, making him a valuable figure in the field.