This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Applied Materials, Inc.. Active years: 2012-2016.
Location History:
- Shanghai, CN (2012)
- Xi'an, CN (2016)
Company Filing History:
Years Active: 2012-2016
Title: Innovations of Shengde Zhong
Introduction
Shengde Zhong is a notable inventor based in Xi'an, China. He has made significant contributions to the field of substrate inspection and processing technology. With a total of 2 patents to his name, his work focuses on enhancing the efficiency and effectiveness of solar cell production.
Latest Patents
One of Shengde Zhong's latest patents is the "Linear Inspection System." This invention relates to comprehensive and expandable substrate inspection systems. The systems include multiple metrology units designed to inspect, detect, or measure various characteristics of a substrate, such as thickness, resistivity, saw marks, geometry, stains, chips, micro cracks, crystal fraction, and photoluminescence. These inspection systems are instrumental in identifying defects on substrates and estimating the solar cell efficiency of a solar cell produced with the substrate before it undergoes processing. Substrates can be transferred through the inspection system between metrology units on a track or conveyor, and subsequently sorted based on the inspection data.
Another significant patent by Shengde Zhong is the "Interior Antenna for Substrate Processing Chamber." This invention features an antenna designed to couple RF energy to a plasma within a process chamber. The antenna comprises a coil with a face exposed to the plasma in the chamber. A series of standoffs support the coil at a predetermined distance from the chamber wall, with at least one standoff containing a terminal through which electrical power is supplied to the coil from an external source. The terminal includes a conductor receptacle and a jacket, with the length of the receptacle being greater than that of the jacket.
Career Highlights
Shengde Zhong is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at this organization has allowed him to further develop his innovative ideas and contribute to advancements in technology.
Collaborations
Shengde has collaborated with several talented individuals, including Mahendra Bhagwat Lokhande and Asaf Schlezinger. These collaborations have fostered a creative environment that encourages the exchange of ideas and expertise.
Conclusion
Shengde Zhong's contributions to substrate inspection and processing technology are noteworthy. His innovative patents reflect his commitment to improving solar cell production efficiency. Through his work at Applied Materials, Inc., he continues to make strides in the field of materials engineering.