Sheng-Yu Chen

Title: Innovations by Sheng-Yu Chen in Chemical-Mechanical Polishing

Introduction

Sheng-Yu Chen is a notable inventor based in Taichung County, Taiwan. He has made significant contributions to the field of chemical-mechanical polishing, which is essential in various manufacturing processes, particularly in the semiconductor industry. His innovative approach has led to the development of a unique apparatus that enhances the efficiency of polishing pads.

Latest Patents

Sheng-Yu Chen holds a patent for a "Chemical-mechanical polishing apparatus and method of conditioning polishing pad." This invention comprises a chemical-mechanical polishing apparatus that includes a polishing platen, a polishing pad, slurry supplying piping, a polishing pad conditioner, chemical reagent supplying piping, and splitting piping. The design allows for effective delivery of slurry and chemical reagents to the polishing pad, improving the overall polishing process.

Career Highlights

Sheng-Yu Chen is associated with United Microelectronics Corporation, a leading company in the semiconductor industry. His work at this organization has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in semiconductor manufacturing.

Collaborations

Some of his coworkers include Te-Sung Hung and Chung-Jun Cheng, who have likely collaborated with him on various projects within the company.

Conclusion

Sheng-Yu Chen's contributions to chemical-mechanical polishing technology demonstrate his innovative spirit and commitment to enhancing manufacturing processes. His patent reflects a significant advancement in the field, showcasing his expertise and the potential for further developments in semiconductor technology.