Sheng-Hung Li

Title: Innovations of Sheng-Hung Li in Microstructure Fabrication

Introduction

Sheng-Hung Li is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of micro-electro-mechanical systems (MEMS). His innovative approach to fabricating microstructures has garnered attention in the semiconductor industry.

Latest Patents

Sheng-Hung Li holds a patent for a "Method for fabricating a microstructure." This method involves forming at least one insulation layer that includes a micro-electro-mechanical structure over a silicon substrate. The microstructure consists of independent microstructures and a metal sacrificial structure. The process includes creating multiple metal layers and via layers within the sacrificial structure. A barrier layer is then formed over the insulation layer, followed by an etching stop layer on the silicon substrate. An etching operation is performed to create a space for the microstructure, leading to the successful suspension of the microstructure.

Career Highlights

Sheng-Hung Li is currently employed at Memsmart Semiconductor Corporation, where he continues to advance his research and development efforts. His work has been instrumental in enhancing the capabilities of microstructure fabrication techniques.

Collaborations

He collaborates with esteemed colleagues such as Siew-Seong Tan and Cheng-Yen Liu, contributing to a dynamic research environment that fosters innovation.

Conclusion

Sheng-Hung Li's contributions to microstructure fabrication exemplify the innovative spirit of modern inventors. His patent and ongoing work at Memsmart Semiconductor Corporation highlight the importance of advancements in semiconductor technology.