Company Filing History:
Years Active: 2021-2025
Title: Innovations of Sheng-Hsun Lu in Semiconductor Technology.
Introduction
Sheng-Hsun Lu is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding three patents that showcase his innovative approach to fabrication tools.
Latest Patents
One of his latest patents is titled "Semiconductor tool having controllable ambient environment processing zones." This invention involves a semiconductor fabrication tool that includes a first heating plate and a second heating plate arranged vertically within a processing chamber. The design features two exhaust ports, each communicating with their respective heating plates, allowing for controlled exhaust pressure. Another patent under the same title focuses on a semiconductor fabrication tool with distinct processing zones, each having different ambient environments. This tool includes adjustable fluid control elements that independently manage the conditions in each processing zone.
Career Highlights
Sheng-Hsun Lu works at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing the capabilities of semiconductor fabrication tools, enhancing efficiency and precision in the manufacturing process.
Collaborations
He collaborates with notable coworkers, including Chiao-Chun Hsu and Chung-Yi Yu, who contribute to the innovative projects at their company.
Conclusion
Sheng-Hsun Lu's contributions to semiconductor technology through his patents reflect his expertise and commitment to innovation. His work continues to influence the industry and drive advancements in fabrication techniques.