Shen Peng

Title: Shen Peng: Innovator in Substrate Processing Systems

Introduction

Shen Peng is a notable inventor based in Dublin, California, recognized for his contributions to substrate processing systems. With a total of 3 patents, he has made significant advancements in the field of electrical engineering and processing technologies.

Latest Patents

Shen's latest patents include a substrate processing system that features a coil with an RF powered Faraday shield. This innovative system comprises a processing chamber with a dielectric window and a substrate support designed to hold a substrate. The coil is strategically positioned outside the processing chamber, adjacent to the dielectric window, with a Faraday shield placed between them. An RF generator supplies power to the coil, which is coupled to the Faraday shield through stray capacitance or direct coupling. Additionally, a capacitor is connected to either the coil or the Faraday shield to adjust the voltage standing wave along the coil.

Another significant patent is the articulated direct-mount inductor and associated systems and methods. This invention includes a coil portion with a first articulation portion extending from it. The first mounting structure is designed to contact a terminal of a first electrical component while being positioned outside of the strong electromagnetic field generated by the coil portion. A second articulation portion and mounting structure are similarly configured for a second electrical component, ensuring optimal performance and safety.

Career Highlights

Shen Peng is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on developing advanced technologies that enhance substrate processing capabilities.

Collaborations

Shen collaborates with talented coworkers, including Dan A Marohl and Andras Kuthi, contributing to innovative projects and advancements in their field.

Conclusion

Shen Peng's work in substrate processing systems showcases his expertise and commitment to innovation. His patents reflect a deep understanding of electrical engineering principles and a drive to improve processing technologies.