Vancouver, Canada

Shawna Kervin


Average Co-Inventor Count = 4.0

ph-index = 2

Forward Citations = 41(Granted Patents)


Company Filing History:


Years Active: 2008-2009

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2 patents (USPTO):Explore Patents

Title: Shawna Kervin: Innovator in Temperature Measurement Technologies

Introduction

Shawna Kervin is a prominent inventor based in Vancouver, Canada. She has made significant contributions to the field of temperature measurement and heat-treating methods. With a total of 2 patents to her name, Kervin's work is at the forefront of technological advancements in semiconductor processing.

Latest Patents

Kervin's latest patents focus on innovative temperature measurement and heat-treating methods and systems. One of her methods involves identifying the temperature of a first surface of a workpiece and controlling the energy of an irradiance flash incident on that surface in response to its temperature. This process includes measuring the temperature during the initial portion of the irradiance flash and adjusting the power for the remaining portion. The workpiece often includes a semiconductor wafer, specifically targeting the device side for precise temperature control.

Another patent details a method for measuring the intensity of radiation thermally emitted from a first surface of a workpiece. This method identifies the present temperature based on the emitted intensity and previous thermal properties. The workpiece, again, typically involves a semiconductor wafer, with the device and substrate sides being monitored for temperature changes during irradiation.

Career Highlights

Shawna Kervin is currently employed at Mattson Technology Canada, Inc., where she continues to develop her innovative technologies. Her work has been instrumental in enhancing the efficiency and accuracy of temperature measurement in semiconductor manufacturing processes.

Collaborations

Throughout her career, Kervin has collaborated with notable colleagues, including David Malcolm Camm and Marcel Edmond Lefrancois. These partnerships have contributed to her success and the advancement of her research.

Conclusion

Shawna Kervin is a trailblazer in the field of temperature measurement technologies, with her patents paving the way for advancements in semiconductor processing. Her contributions are vital to the ongoing evolution of this critical industry.

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