The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Dec. 14, 2005
David M. Camm, Vancouver, CA;
Shawna Kervin, Vancouver, CA;
Marcel Edmond Lefrancois, Dartmouth, CA;
Greg Stuart, Burnaby, CA;
David M. Camm, Vancouver, CA;
Shawna Kervin, Vancouver, CA;
Marcel Edmond Lefrancois, Dartmouth, CA;
Greg Stuart, Burnaby, CA;
Mattson Technology Canada, Inc., Vancouver, B.C., CA;
Abstract
Temperature measurement and heat-treating methods and systems. One method includes identifying a temperature of a first surface of a workpiece, and controlling energy of an irradiance flash incident on the first surface of the workpiece, in response to the temperature of the first surface. Identifying may include identifying the temperature of the first surface during an initial portion of the irradiance flash, and controlling may include controlling the power of a remaining portion of the irradiance flash. The first surface of the workpiece may include a device side of a semiconductor wafer.