Location History:
- Hsinchu, TW (2020)
- Taipei, TW (2013 - 2022)
Company Filing History:
3 out of 40,635 
1 out of 4,296 
Years Active: 2013-2022
Title: Shao-Wei Luo: Innovator in Extreme Ultraviolet Technology
Introduction
Shao-Wei Luo, an accomplished inventor based in Taipei, Taiwan, has made significant contributions to the field of extreme ultraviolet (EUV) technology. With a total of four patents to his name, his work focuses on advancing processes and devices that leverage EUV light generation.
Latest Patents
Among his latest patents, Luo has developed a system that includes a master controller, a process chamber, a local controller, a switch, and data storage. This innovative device is designed to generate data according to an EUV light generation process, enhancing the efficiency and effectiveness of semiconductor manufacturing. Another noteworthy invention is the collector pellicle, which is part of an EUV source that features a collector mirror, a drain, and a droplet generator. This pellicle is expertly designed to catch debris from the target material, ensuring the cleanliness and performance of the EUV system.
Career Highlights
Shao-Wei Luo has worked with top-tier organizations such as Taiwan Semiconductor Manufacturing Company (TSMC) and National Tsing Hua University. His experience in these esteemed institutions has allowed him to hone his skills and push the boundaries of EUV technology. His dedication to innovation has not only benefited his career but has also contributed to advancements in the semiconductor industry.
Collaborations
Throughout his career, Luo has collaborated with notable colleagues, including Shang-Chieh Chien and Li-Jui Chen. These professional relationships have played a crucial role in fostering an environment of innovation and have led to successful projects and patents in the EUV domain.
Conclusion
Shao-Wei Luo's innovative spirit and dedication to developing cutting-edge technology in extreme ultraviolet light generation have made him a distinguished figure in his field. As he continues to work on groundbreaking inventions, the impact of his contributions is likely to resonate throughout the semiconductor industry for years to come.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.