This inventor holds 3 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 1994-1999.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Los Gatos, CA (US) (1994 - 1996)
- San Jose, CA (US) (1999)
Company Filing History:
Years Active: 1994-1999
Title: Innovations by Shannon J Kelsey: Pioneering Solutions in Temperature Control and Wafer Support
Introduction
Shannon J Kelsey is an accomplished inventor based in Los Gatos, California, known for her innovative contributions to temperature control technologies and wafer support systems. With a total of three patents to her name, she continues to advance the field of materials processing and semiconductor manufacturing.
Latest Patents
Among her latest innovations is the patent for a "Ceramic dome temperature control using heat pipe structure and method." This invention utilizes heat pipe technology in conjunction with a ceramic dome within a vacuum processing chamber, ensuring uniform temperature maintenance. This is crucial to prevent issues like flaking of deposited materials and premature wear due to elevated temperatures. Another noteworthy patent is for a "Method for supporting a wafer in a combined wafer support and thermocouple assembly." This design features a support basket equipped with wafer support fingers and a thermocouple that accurately measures the temperature against the wafer's backside.
Career Highlights
Shannon Kelsey is currently employed at Applied Materials, Inc., a leader in the materials engineering space. Throughout her career, she has focused on developing innovative solutions that enhance the performance and reliability of semiconductor manufacturing processes.
Collaborations
In her endeavors, Shannon has collaborated with notable colleagues, including Michael N Sugarman and Michael Beesely. These partnerships have contributed significantly to her research and patent developments, amplifying the impact of her work in the industry.
Conclusion
Shannon J Kelsey’s inventiveness and dedication to improving temperature control and wafer support systems have established her as a respected figure in her field. Her contributions not only reflect her expertise but also signify a continuous drive toward innovation within the technology sector. Her work at Applied Materials, Inc. and her collaborative spirit promise further advancements in semiconductor manufacturing technologies.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile