The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 1999
Filed:
Nov. 30, 1995
Applicant:
Inventors:
Shannon J Kelsey, San Jose, CA (US);
Philip M Salzman, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F28F / ;
U.S. Cl.
CPC ...
165 802 ; 165 801 ; 16510426 ; 165169 ; 118724 ; 118725 ;
Abstract
This invention relates to a structure and method for using heat pipe technology in combination with a ceramic dome of a vacuum processing chamber to help maintain the uniformity of temperature in the dome and avoid differences in temperature in the dome which may cause deleterious flaking of process deposition, or allow elevated temperatures in the dome to cause premature wear of the material. A heat pipe can be in thermal contact with the dome (process chamber surface) or can actually be part of the heat pipe/dome structure.