This inventor holds 2 USPTO granted patents and 1 published patent application and 1 EPO patent. Top assignee: Kla Corporation. Active years: 2023-2024.
Location History:
- Milpitas, CA (US) (2023)
- Hayward, CA (US) (2024)
Company Filing History:
Years Active: 2023-2024
Title: Innovations by Inventor Shannon Hill
Introduction
Shannon Hill is an accomplished inventor based in Milpitas, CA (US). He has made significant contributions to the field of vacuum systems and optical-path coupling technologies. With a total of 2 patents, his work showcases innovative solutions that address complex engineering challenges.
Latest Patents
One of Shannon's latest patents is for a Dual Vacuum Seal. This vacuum system includes a wall of a vacuum chamber, a flange of the vacuum chamber, an outer seal disposed between the wall and the flange, and an inner seal disposed between the wall and the flange. The outer seal is made from a first material, while the inner seal consists of a second material that is distinct from the first. The inner seal is positioned closer to the interior of the vacuum chamber than the outer seal and is separated by a gap. This design allows the outer seal to provide tighter vacuum sealing than the inner seal, which is more resistant to gases used for cleaning the vacuum chamber's interior.
Another notable patent is the System and Method for Optical-Path Coupling of Light for In-Situ Photochemical Cleaning in Projection Imaging Systems. This system is designed for cleaning optical surfaces of overlay inspection systems. It includes a first illumination source, a detector, a set of illumination optics, and a set of imaging optics. In some embodiments, the system may also feature additional illumination sources to aid in the removal of contaminants from optical surfaces.
Career Highlights
Shannon Hill is currently employed at Kla Corporation, where he continues to innovate and develop advanced technologies. His work has significantly impacted the efficiency and effectiveness of vacuum systems and optical cleaning processes.
Collaborations
Shannon collaborates with talented coworkers, including Francis Chilese and Gildardo Rios Delgado. Their combined expertise fosters a creative environment that drives innovation.
Conclusion
Shannon Hill's contributions to the fields of vacuum systems and optical-path coupling demonstrate his commitment to advancing technology. His innovative patents reflect a deep understanding of engineering principles and a dedication to solving real-world problems.
