Company Filing History:
Years Active: 2001-2003
Title: Innovations of Shankar Venkataranan
Introduction
Shankar Venkataranan is a notable inventor based in Santa Clara, CA. He has made significant contributions to the field of semiconductor technology, particularly in the deposition of dielectric films and processing of semiconductive wafers. With a total of 2 patents, his work has advanced the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of his latest patents is titled "Method and apparatus for forming a dielectric film using helium as a carrier gas." This invention focuses on the deposition of dielectric layers, specifically borophosphosilicate glass (BPSG). The method utilizes helium as a carrier gas, which results in improved film uniformity, higher deposition rates, and reduced residue compared to conventional nitrogen-based processes. This innovation not only enhances the quality of the dielectric layers but also prolongs the time between necessary chamber cleanings, thereby increasing throughput.
Another significant patent by Venkataranan is "Method and apparatus for processing semiconductive wafers." This invention provides a method for forming thin insulating layers of silicon oxide (SiO2) on large diameter semiconductive wafers. By directing two reactive gas streams in close proximity to the wafer surface, the invention achieves high uniformity across the wafer. The swirling mixture of gases ensures thorough mixing and consistent deposition of the insulating layer.
Career Highlights
Shankar Venkataranan is currently employed at Applied Materials, Inc., a leading company in the semiconductor manufacturing equipment industry. His work at Applied Materials has positioned him as a key contributor to advancements in semiconductor technology.
Collaborations
Throughout his career, Venkataranan has collaborated with notable colleagues, including Scott A Hendrickson and Inna Shmurun. These collaborations have further enriched his contributions to the field.
Conclusion
Shankar Venkataranan's innovative patents and contributions to semiconductor technology demonstrate his expertise and commitment to advancing the industry. His work continues to influence the efficiency and quality of semiconductor manufacturing processes.