Location History:
- San Jose, CA (US) (2011 - 2014)
- Fremont, CA (US) (2016)
Company Filing History:
Years Active: 2011-2016
Title: Innovations of Shang-I Chou
Introduction
Shang-I Chou is a prominent inventor based in San Jose, California. He has made significant contributions to the field of semiconductor technology, holding a total of six patents. His work focuses on enhancing the efficiency and effectiveness of plasma etch chambers, which are crucial in semiconductor manufacturing.
Latest Patents
One of Shang-I Chou's latest patents is titled "System, method and apparatus for RF power compensation in plasma etch chamber." This invention involves a system and method for applying power to a target plasma chamber. It includes characterizing the no plasma performance slope of the chamber, applying a selected plasma recipe, and monitoring a recipe factor value on the RF electrode. The invention generates a ratio of process efficiency by comparing the target chamber with a reference chamber, ultimately calculating an adjusted power set point value to optimize power delivery.
Another notable patent is "Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates." This invention features a quartz window with an interior plenum that operates as a shutter or UV filter in a degas chamber. By supplying the plenum with an ozone-containing gas, the pressure can be adjusted to control UV light transmission, enhancing the cleaning process for semiconductor substrates.
Career Highlights
Shang-I Chou is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to develop innovative solutions that address challenges in plasma processing.
Collaborations
Throughout his career, Shang-I Chou has collaborated with notable colleagues, including Yen-Kun Victor Wang and Robert G. O'Neill. These collaborations have contributed to the advancement of technology in the semiconductor field.
Conclusion
Shang-I Chou's contributions to semiconductor technology through his patents and work at Lam Research Corporation highlight his innovative spirit and dedication to improving manufacturing processes. His inventions continue to play a vital role in the advancement of the semiconductor industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.