This inventor holds 1 USPTO granted patent. Top assignee: Kla-Tencor Technologies Corporation. Active years: 2007.
Company Filing History:
Years Active: 2007
Title: Shakar Krishnan: Innovator in Optical Measurement Technologies
Introduction
Shakar Krishnan is a notable inventor based in Santa Clara, CA, who has made significant contributions to the field of optical measurement technologies. With a focus on advanced measurement systems, he has developed innovative methods that enhance the accuracy and efficiency of overlay and profile asymmetry measurements.
Latest Patents
Shakar Krishnan holds a patent for "Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals." This patent describes systems and methods that utilize ellipsometer configurations to measure the partial Mueller matrix and the complete Jones matrix of isotropic or anisotropic systems. The invention combines multiple signals into a composite signal that satisfies symmetry assumptions, allowing for the efficient extraction of overlay information and profile asymmetry measurements.
Career Highlights
Shakar is currently employed at KLA-Tencor Technologies Corporation, where he applies his expertise in optical measurement technologies. His work has contributed to advancements in the field, particularly in the development of systems that improve measurement accuracy and efficiency.
Collaborations
Throughout his career, Shakar has collaborated with esteemed colleagues, including Daniel Kandel and Kenneth P. Gross. These collaborations have fostered innovation and have led to the development of cutting-edge technologies in optical measurement.
Conclusion
Shakar Krishnan's contributions to optical measurement technologies exemplify the impact of innovative thinking in advancing scientific understanding and practical applications. His work continues to influence the field and inspire future developments.