This inventor holds 1 USPTO granted patent and 6 published patent applications. Top assignee: Samsung Electronics Ltd.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Seungbin Lim - Innovator in Plasma Processing Technology
Introduction
Seungbin Lim is an inventor based in Suwon-si, South Korea. He is known for his contributions to the field of plasma processing technology. Although he currently holds no granted patents, his innovative ideas are reflected in his latest patent applications.
Latest Patent Applications
Seungbin Lim has filed several notable patent applications, including:
1. **GAS SUPPLY DEVICE AND PLASMA PROCESSING APPARATUS** - This application describes a gas supply device that includes multiple flow ratio controllers. These controllers are designed to output various processing gases from a gas box according to predetermined flow ratios. The device also features switching valve sets and a conductance control valve to manage gas flow effectively.
2. **SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USING THE SAME** - This application outlines a substrate processing apparatus that consists of a process chamber and a plasma generating portion. The plasma generating portion includes an inner antenna ring, an outer antenna ring, and a core ring made of magnetic material.
Conclusion
Seungbin Lim's work in plasma processing technology showcases his innovative spirit and potential for future contributions to the field. His latest patent applications reflect his commitment to advancing technology in this area.