Sergey Zalubovsky

Title: Innovations by Sergey Zalubovsky

Introduction

Sergey Zalubovsky is a prominent inventor based in San Jose, California. He has made significant contributions to the field of semiconductor metrology, holding a total of six patents. His work focuses on advanced measurement techniques that enhance the accuracy and efficiency of semiconductor device characterization.

Latest Patents

One of his latest patents is titled "Full beam metrology for x-ray scatterometry systems." This patent describes methods and systems for characterizing dimensions and material properties of semiconductor devices using full beam x-ray scatterometry. The system involves illuminating a sample with an X-ray beam and detecting the intensities of the resulting zero diffraction order and higher diffraction orders simultaneously. This simultaneous measurement allows for high throughput measurements with improved accuracy. The system includes photon counting detectors with high dynamic range and thick, highly absorptive crystal substrates that minimize parasitic backscattering.

Another notable patent is "Transmission small-angle X-ray scattering metrology system." This patent outlines methods and systems for characterizing dimensions and material properties of semiconductor devices using transmission small angle x-ray scatterometry (TSAXS) systems. These systems have a relatively small tool footprint and enable adequate Q space resolution for metrology of semiconductor structures. The x-ray beam is focused closer to the wafer surface for small targets and closer to the detector for larger targets. The use of high-resolution detectors with sub-pixel accuracy enhances the measurement capabilities of the system.

Career Highlights

Sergey has worked with notable companies in the semiconductor industry, including Kla Tencor Corporation and Kla Corporation. His experience in these organizations has contributed to his expertise in metrology and semiconductor device characterization.

Collaborations

Throughout his career, Sergey has collaborated with talented individuals such as Antonio Arion Gellineau and Thaddeus Gerard Dziura. These collaborations have further enriched his work and innovations in the field.

Conclusion

Sergey Zalubovsky's contributions to semiconductor metrology through his innovative patents and collaborations highlight his significant role in advancing technology in this field. His work continues to impact the accuracy and efficiency of semiconductor device characterization.