Company Filing History:
Years Active: 2014-2015
Title: The Innovations of Sergej Mutas
Introduction
Sergej Mutas is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of semiconductor technology, holding two patents that showcase his expertise and innovative spirit. His work primarily focuses on methods for fabricating semiconductor devices and integrated circuits.
Latest Patents
One of Sergej Mutas's latest patents is titled "Semiconductor device fabrication methods." This patent describes a method for fabricating a semiconductor device that includes forming first and second gate structures over a semiconductor substrate. The process involves depositing a layer of a silicide-resistant material over the gate structures and substrate, forming sidewall spacers, and implanting conductivity-determining impurities in the source and drain regions. The method ensures that silicide formation is prevented at the second gate structure, enhancing the device's performance.
Another significant patent is "Methods for fabricating integrated circuits having improved spacers." This patent outlines a method that includes providing a semiconductor substrate with a gate structure and utilizing an atomic layer deposition (ALD) process to deposit a spacer around the gate structure. The ALD process involves alternating the flow of ionized radicals and a chlorosilane precursor to achieve the desired spacer characteristics.
Career Highlights
Sergej Mutas is currently employed at Globalfoundries Inc., a leading company in semiconductor manufacturing. His work at Globalfoundries has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in semiconductor technology.
Collaborations
Throughout his career, Sergej has collaborated with talented individuals such as Fabian Koehler and Dina Triyoso. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.
Conclusion
Sergej Mutas is a prominent figure in the semiconductor industry, with a focus on innovative fabrication methods. His patents reflect his commitment to advancing technology and improving semiconductor devices. His contributions continue to influence the field and inspire future innovations.