SeoYoung Lee

Title: SeoYoung Lee: Innovator in Semiconductor Technology

Introduction

SeoYoung Lee is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approaches to material deposition and structure formation.

Latest Patents

SeoYoung Lee's latest patents include advancements in 3D NAND technology. One of his notable patents, titled "Modified stacks for 3D NAND," describes exemplary methods of forming semiconductor structures. These methods involve creating a silicon oxide layer from a silicon-containing precursor and an oxygen-containing precursor. Additionally, a silicon nitride layer is formed from a silicon-containing precursor, a nitrogen-containing precursor, and an oxygen-containing precursor. The resulting silicon nitride layer is characterized by an oxygen concentration greater than or about 5 at. %. The process includes repeating the formation of silicon oxide and silicon nitride layers to produce a stack of alternating layers.

Another significant patent is "Multi-layer deposition and treatment of silicon nitride films." This patent outlines processing methods that include forming a first deposition plasma of a silicon-and-nitrogen-containing precursor. The methods detail the deposition of a silicon nitride material on a semiconductor substrate, followed by treatment with a helium-and-nitrogen-containing precursor. The patent also discusses the flow rate ratios and power levels used in the treatment plasmas, highlighting the innovative techniques employed in semiconductor manufacturing.

Career Highlights

SeoYoung Lee is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work focuses on developing advanced materials and processes that enhance semiconductor performance and efficiency.

Collaborations

SeoYoung has collaborated with notable coworkers, including Hang Yu and Xinhai Han, contributing to various projects that push the boundaries of semiconductor technology.

Conclusion

SeoYoung Lee's contributions to semiconductor technology through his patents and work at Applied Materials, Inc. demonstrate his commitment to innovation in the field. His advancements in 3D NAND technology and silicon nitride films are paving the way for future developments in semiconductor manufacturing.