Seok Ho Lee

Title: Seok Ho Lee: Innovator in Plasma Detection Technology

Introduction

Seok Ho Lee is a prominent inventor based in Pyeongtaek-si, South Korea. He has made significant contributions to the field of plasma detection technology. His innovative work has led to the development of a unique device that enhances the sensitivity and speed of plasma detection.

Latest Patents

Seok Ho Lee holds a patent for a "Device for detecting plasma of ultra fast with multi channel." This device includes a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber. It extends to ground and receives a first leakage current leaking through the substrate to increase reception sensitivity. The device also features a first current detection module that detects the first leakage current, a current measurement module that extracts the received first leakage current for each predetermined period, and a control module that generates arcing occurrence information by comparing the leakage current measurement with a reference value.

Career Highlights

Seok Ho Lee is associated with T.O.S Co., Ltd., where he continues to innovate and develop advanced technologies. His work has been instrumental in improving the efficiency and effectiveness of plasma detection methods.

Collaborations

He has collaborated with notable colleagues, including Yong Kyu Kim and Bum Ho Choi, who have contributed to his research and development efforts.

Conclusion

Seok Ho Lee's contributions to plasma detection technology exemplify the spirit of innovation. His patented device represents a significant advancement in the field, showcasing his expertise and dedication to improving technological processes.