Company Filing History:
Years Active: 2008-2010
Title: Innovations of Senquan Zhou in Laser Thermal Processing
Introduction
Senquan Zhou is a notable inventor based in San Jose, California. He has made significant contributions to the field of laser thermal processing, particularly in the development of advanced chuck technologies. With a total of two patents to his name, Zhou's work focuses on maintaining optimal temperatures during semiconductor processing.
Latest Patents
Zhou's latest patents include a "Heated Chuck for Laser Thermal Processing" and a "Laser Thermal Processing Chuck with a Thermal Compensating Heater Module." The first patent describes a chuck designed to support a wafer while maintaining a constant background temperature during laser thermal processing. This innovative chuck features a heat sink and a thermal mass in the form of a heater module, which is thermally connected to the heat sink but separated by a thermal insulator layer. This design ensures that the chuck can effectively manage heat transfer from the wafer to the heat sink, even under varying thermal loads.
The second patent introduces a chuck that employs heat pipe principles to equalize temperature differences within a thermal compensating heater module. This module contains heater elements, a wick, and an alkali metal liquid/vapor, allowing for rapid uniformity in temperature across the semiconductor substrate. The design accommodates large temporal variations in thermal load, ensuring precise temperature control.
Career Highlights
Senquan Zhou is currently employed at Ultratech, Inc., where he continues to innovate in the field of semiconductor processing. His work has been instrumental in enhancing the efficiency and effectiveness of laser thermal processing techniques.
Collaborations
Zhou collaborates with esteemed colleagues such as Iqbal A Shareef and Igor Landau, contributing to a dynamic research environment that fosters innovation and technological advancement.
Conclusion
Senquan Zhou's contributions to laser thermal processing through his patents and work at Ultratech, Inc. highlight his role as a leading inventor in the semiconductor industry. His innovative designs are paving the way for more efficient processing techniques in the field.