Sen-Yeo Peng

Title: Sen-Yeo Peng: Semiconductor Process and Equipment Innovations.

Introduction

Sen-Yeo Peng is an inventor based in Hsinchu, Taiwan. His patent work includes innovations in liquid cooling systems and automated wafer cleaning. He is associated with Taiwan Semiconductor Manufacturing Company Limited and has 5 patents.

Latest Patents

Peng’s listed latest patents address equipment and methods relevant to semiconductor manufacturing.

“System and method for operating the same” describes a system with a cooler, a concentration meter, and two pumps. The cooler uses a second liquid to cool a first liquid, while the meter measures the first liquid’s concentration. A first pump moves the first liquid according to that concentration, and a second pump moves the cooling liquid. The pumps are arranged in parallel.

“Automated wafer cleaning” describes a method for cleaning a rotating wafer with carefully directed streams of liquid and gas. The process applies liquid along a line extending from near the wafer’s center to its edge, with separate streams directed at inner, middle, and outer portions before additional liquid and gas are applied along the line.

Career Highlights

Peng’s disclosed inventions focus on systems and processes that support semiconductor fabrication. His work on liquid management combines cooling, concentration measurement, and controlled pumping, while his wafer-cleaning method specifies how fluids are applied across different regions of a rotating wafer.

Collaborations

Peng is associated with Taiwan Semiconductor Manufacturing Company Limited. His listed coworkers include Chui-Ya Peng and Jia-Rong Xiao.

Conclusion

Sen-Yeo Peng’s patent portfolio reflects contributions to semiconductor equipment and manufacturing processes, particularly liquid handling and automated wafer cleaning.