Chiba, Japan

Seiro Murakami


Average Co-Inventor Count = 3.4

ph-index = 12

Forward Citations = 995(Granted Patents)


Location History:

  • Tokyo, JP (1987 - 1989)
  • Chiba-ken, JP (1998 - 1999)
  • Chiba, JP (1995 - 2005)

Company Filing History:


Years Active: 1987-2005

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13 patents (USPTO):Explore Patents

Title: The Innovative Mind of Seiro Murakami: Pioneering Exposure Apparatus Technology

Introduction: Seiro Murakami, an accomplished inventor hailing from Chiba, Japan, has made significant contributions to the field of exposure apparatus technology. With a remarkable portfolio consisting of 13 patents, Murakami has demonstrated his adeptness at developing innovative solutions that enhance the efficiency and precision of manufacturing processes.

Latest Patents: Among Murakami's most recent patents are advanced methodologies for exposure apparatuses that utilize plural mask and object stages capable of moving in opposite directions. This groundbreaking technique involves synchronously moving a mask stage and a substrate stage, while ensuring the masks on both stages are illuminated efficiently. By canceling the reaction force on the base board during stage movements, the vibrations within the exposure apparatus can be effectively suppressed, significantly improving performance. Additionally, his exposure method allows for the simultaneous alignment operation on multiple substrate stages while executing exposure tasks, thereby optimizing throughput in production.

Career Highlights: Throughout his career, Seiro Murakami has worked with reputable companies such as Nikon Corporation and Nippon Kogaku K.K., where he has honed his development and engineering skills. His innovations have not only pushed technological boundaries but have also contributed to advancing the capabilities of the imaging and photolithography industries.

Collaborations: Murakami's work has often involved collaboration with notable colleagues, including Kenji Nishi and Yasuaki Tanaka. Their shared dedication to advancing technology has undoubtedly played a role in the success of various projects and patents throughout their careers.

Conclusion: Seiro Murakami stands out as an influential figure in the realm of invention and innovation. His extensive experience and unique insights have led to the development of cutting-edge technologies that continue to shape the industry. As he progresses further in his career, it will be exciting to see the future innovations that emerge from his inventive mind.

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