Location History:
- Kokubunji, JP (1994)
- Hachioji, JP (1996 - 1998)
- Sapporo, JP (2003)
Company Filing History:
Years Active: 1994-2003
Title: Seiji Yamamoto: Innovator in Polishing and Surface Analysis Technologies
Introduction
Seiji Yamamoto is a prominent inventor based in Hachioji, Japan. He has made significant contributions to the fields of polishing and surface analysis technologies. With a total of 4 patents to his name, his work has had a considerable impact on various industrial applications.
Latest Patents
One of his latest patents is a dry chemical-mechanical polishing method. This invention provides an efficient way to perform etching by bringing the surface of a polishing specimen into contact with a polishing tool while supplying plasma from a plasma source. The method involves moving the relative positions of the polishing specimen and the polishing tool, which allows for effective polishing and planarizing of the surface. This process increases the diameter of the polishing specimen to be larger than that of the polishing tool, ensuring that part of the surface is exposed to the plasma atmosphere during operation.
Another notable patent is a surface analyzing method and its apparatus. This method includes several steps: generating multiply-charged ions of specific ion species, decelerating these ions to a lower kinetic energy, irradiating the decelerated ions onto the surface of a sample, and analyzing the emitted particles or light. The unique aspect of this method is that it allows for high sensitivity and resolution in analyzing the top surface layer of a sample, providing valuable information about the atoms and their bonding states.
Career Highlights
Seiji Yamamoto is currently employed at Hitachi, Ltd., where he continues to innovate and develop new technologies. His work has been instrumental in advancing the capabilities of polishing and surface analysis, making significant contributions to the industry.
Collaborations
Throughout his career, Yamamoto has collaborated with notable colleagues, including Kozo Mochiji and Taro Ogawa. These collaborations have further enhanced the quality and impact of his inventions.
Conclusion
Seiji Yamamoto is a distinguished inventor whose work in polishing and surface analysis technologies has led to significant advancements in the field. His innovative patents and collaborations reflect his commitment to excellence and innovation.